Dielectric materials in EL display device
Special Features
E-beam evaporation system for small scale organic EL device production.
In-line processed with glove box.
Side-sliding door type.
Smooth surface(RMS roughness < 20 nm).
Specifications
Wafer capacity : 1 × 5"
Average throughput Up to 5,000 wafers per year
Dimension : 1,730L × 1,800H × 725W (mm3)
Power : AC(1A, -10kV) for e-beam source
Pump : rotary(1,000l/min) & cryo(650l/s)
Substrate rotation (up to 50 rpm)
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