Large Area Rapid Thermal Annealing System Manufacturers,Large Area Rapid Thermal Annealing System Suppliers

Description

Features LRS5000 system is batch-production equipment that supports annealing process the quality control and large-scale production are possible. The high reliability assures low cost of ownership. Specification Square Chamber(internal size : 660mm x 660mm x 150mm)- cold wall & contamination free Sample Capacity : 125mm x 125mm x 16PCS, 156mm x 9PCS Maximum Temperature : 1200°C Process Temperature Range : 300~1100°C Sustain Time : More than 2min. at 1100°C Limping Rate : 10 to 20°C / sec Cooling Rate : 5 to 10°C / sec Heating Uniformity : Less than < ±10%(530mm x 530mm Area) Gas mixing capability with MFC Automation System using PC interface(option) Atmospheric & Vacuum Process are Possible.

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