Features
ZENITHWORLD is running the standard micro contamination control process for LCD parts made from the dry etch/sputter process, in order to meet customer needs. In every part of the contamination control process, the company applies its sophisticated cleaning technology and expertise.
Cleaning Process
Major cleaning parts for DRY ETCH are; Focus Ring, Y2O3 Coating Focus Ring, Shield Ceramics, Anodizing Coating dual Wall, Anodizing Coating Baffle Plate and other anodizing parts.
Upper Electrode
Focus Ring
Shield Ceramic
Baffle plate
Major Sputter cleaning parts; Ground...