APCVD

  Viatron's APCVD system offers uniform high quality films of ceramics, semiconductors, or metals on large glasses at low cost and high production level.  Viatron offers two types of APCVD systems. HTCVD system is a high temperature in-line type APCVD with high throughputs. LTCVD system is a cluster-type low temperature APCVD which can produce multilayer films. The flexible configration aspect of the system allows us to design the systems for customers' specific processes and applications.  We offer complete processing package, including precursor sources and process formulas...

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• APCVD made in Korea

FE-RTP

 FE-RTP system was developed for rapid thermal treatment and annealing for the production of poly-Si on glass substrates for AMOLED, LCD, and photovoltaic cell manufacturing. FE-RTP system offers patented in-line module processing which enables thermal processes at high temperatures up to 750°C without thermal damage to glass substrates by providing extremely uniform temperature profiles and sequential heating/cooling features. The FE-RTA module of the FE-RTP system provides rapid heating capability in combination with alternating magnetic fields which enhances the efficiency of...

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• Other Manufacturing & Processing Machinery made in Korea
• FE-RTP made in Korea