Characteristics and Application of ZrO2-Y2O3 Thermal Spray Powder
- Particle Size : 11 ~ 63 ㎛
- High Coefficient of Expansion : 10 ~ 10.5 × 10-6
- Low Heat Conduction Quality : 1.0 W/m.k 이하
- High Temperature Stability : It isn’t shown the phase change below 2,500℃.
- Application : It is used to Thermal barrier coating(TBC) by using characteristics of high temperature stability and low heat conduction quality.
Material | Characteristics | Usage |
---|---|---|
ZrO2-Y2O3 | High Temperature Stability, High Coefficient of Expansion, Low Heat Conduction Quality | TBC (Thermal barrier coating) |
Y2O3 | High Temperature Stability, Anti-plasma | CVD, etcher parts (For In-Plasma) |
Al2O3 | High Dielectric Constant | Electrostatic Chuck |
Al2O3-Y2O3 | Anti-plasma | CVD, etcher parts (For In-Plasma) |
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