Y2O3 Powder Manufacturers,Y2O3 Powder Suppliers

Description

Particle Size : 11 ~ 63 ㎛
Purity : 99.9%
Related to characteristics of the high binding energy with fluoride ion, it is given characteristics to the etching equipment, CVD equipment or parts of the washing process applying agitated fluoride into plasma.
It is high temperature stability which isn’t shown the phase change to a melting point and has outstanding resistance for physical and chemical erosion of molten metal, slag, salt and others, and it is used to thermal spray coating of parts which is corroded in high temperature.

Material	Characteristics	Usage
ZrO₂-Y₂O₃	High Temperature Stability, High Coefficient of Expansion, Low Heat Conduction Quality	TBC (Thermal barrier coating)
Y₂O₃	High Temperature Stability, Anti-plasma	CVD, etcher parts (For In-Plasma)
Al₂O₃	High Dielectric Constant	Electrostatic Chuck
Al₂O₃-Y₂O₃	Anti-plasma	CVD, etcher parts (For In-Plasma)

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