Description

Protection Gate Valve

** Application
- Etch, CVD (MO, PE, HDP, LP)Implant, Sputtering
- Nanotechnology process with high particulate levels
- Thin film photovoltaic panels

** Features
- Protects process environment from back-streaming powder in the event of dry pump failure
- Reduces expensive down time in powder producing process
Fast pneumatic actuation-closes in <0.5 seconds(Normal 0.7seconds)
- Long cycle life under adverse process conditions

** Options
- Available with either ISO 100-K or ISO 160-K flanges
- 1, 2, 3 or 4 channel options

Specifications

Pressure range		1 X 10-7mbar.l/s
Leak rate : body, seat		<6 X 10-8mbar.l/s
Differential pressure on the gate		≤ 1.2 bar in either direction
Material	Valve body, bonnet seal, blade	SS304
	Welded bellows	SS316L
	Valve actuator	AL6061
Seal Materials		VITON (option KALREZ, ETC)
Temperature	Valve body	120°C (option 180°C)
	Valve actuator	80°C
Operation		Double acting
Cycle until first service		≥ 100,000
Position sensor (open/close) - Reed switch		SMC(D-A93)

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