The silicon ring mounted around wafer on ESC serves to maintain a uniform plasma density and etching rate
Applications
- Dry etcher process
- Focus Ring
- Insert Ring
- Collar Ring
- Shield Ring
- Hot Edge Ring
- Protection Ring
The silicon ring mounted around wafer on ESC serves to maintain a uniform plasma density and etching rate
Applications
- Dry etcher process
- Focus Ring
- Insert Ring
- Collar Ring
- Shield Ring
- Hot Edge Ring
- Protection Ring
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