Flow Meter

Flow Meter Made in Korea

Description

FEATURES * Liquid supply system and tools used for semiconductor and all processing * Compact, Easy to use * Extremely low internal volume * 0 to 5VDC output models available * Cleaning and package in CAS semiconductor's Factory * "CE" & "S" marks approved     SPECIFICATIONS 1. Model : CAS-FM Series 2. Liquid : All Liquid (D.I water, FC-3283,Galden, etc) 3. Range           Standard, 1~250 LPM           Different Range Available 4. Accuracy : ± 0.5 % of Full scale 5. Operating Temperature : -40~150°c                                    Option : -100~250°c 6. Humidity : 0 to 95% RH 7. Power : 24 VDC with reserve polarity protection 8. Output : 0~5VDC 9. Electromagnetic compatibility (EMC & EMI)           " S" - according to EN55011 : 1998/A1:1999/A2:2002                       & EN61000-6-2:2001 10. Material :         Body : Stainless Steel 316L         Sensor : Aluminum 11. Sensor Type : Pick-up Sensor, Hall Sensor

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