High Vacuum Multi Layer Coating Equipment

Model Vertical Type : DMC-1100A, DMC-1300A, DMC-1500A Horizontal Type : DMC-1600H, DMC-1700H Outline These Coaters are designed for coating multi thin film such as metal film, insulation film, semiconductor film and optic onto pretreared plastics, metals, glasses on production scale. Therefore, model DMC-1600H, DMC-1700H are the extra large coaters which have strong point of extra large Vacuum Drum Chamber, moving drum Chamber type for mass production. Feature The coating which is uniform Temperature distribution which is uniform Reappearance characteristic of product is excellent Easy control of operation Fast speed of exhaust pumping Reappearance characteristic of high quality product is excellent Automatic operation Mass production Horizontal axis rotation, Upward coating type Available multi purpose coating by change jig Available both sides coating by jig turning in the revers direction of products Application Filter for C.R.T Reflect mirrors Optical filter & lenses Aurora coating Various non-reflect coating Lens for glasses lens for camera Special reflect mirrors Electronic components AR coating ITO coating Helmet for autobike Others Standard Specification Model Vertical type Horizental type DMC-1100A DMC-1300A DMC-1500A DMC-1600H DMC-1700H Performance Ultimate pressure Torr 10-6(10-7) 10-6(10-7) 10-6(10-7) 10-6(10-7) 10-6(10-7) Evacuation(5x10-5Torr) min 7 8 10 8 8 Structure Vacuum chamber mm Ø1100 x 1400h Ø1300 x 1500h Ø1500 x 1600h Ø1600 x 750L Ø1700 x 750L Substrate rotator mm Ø1000 Ø1200 Ø1400 Ø1500 x 600L Ø1600 x 600L Heating temperature °C 300°C 300°C Electron Beam Gun KVA 10(E-beam) or 3(Pole) 10(E-beam) or 3(Pole) Operating method type Auto and Manual Auto and Manual Measurement Vacuum gauge type Pirani, Penning Pirani, Penning Thickness monitor type Optical or Crystal Optical or Crystal Exhaust Oil rotary pump l/min 3000 4500 6000 3000 4500 Mechanical booster pump m3/hr 600 1200 1200 600 1200 Diffusion pump l/sec 12000x2 12000x2 12000x2 12000x2 12000x2 Poly Coid °C -150°C -150°C Utility Colling water(20°C, 2kg/cm2) l/min 50 55 60 50 55 Compressed air kg/cm2 5-7 5-7 5-7 5-7 5-7 Power KVA 45 48 58 48 55 Option Spec. 10N Source, Poly Cold System(D/P), Poly Cold deforost System(Chamber), Chiller System, Halogen Heater, 2E/B Gun System, Oil Diffusion Pump(26"), Other's Empty & clean Chamber/After Degassing base.This Specification WIll be Change for Improvement Without and Notice Various Coating Samples These coated products illustrated as belows are processed through our Vacuum Coating Equipments.