PFC Decomposition Catalyst Manufacturers,PFC Decomposition Catalyst Suppliers

Description

Purelyst PFC-101 catalyst decomposes PFCs (perfluorocompounds. CF4, CHF3, C2F6, C3F8, NF3, SF6, etc.) under 750 oC by help of steam. PureSphere can recommend customers suitable operation conditions from many experinces at semicondictor and display industries. 1. PFCs Decomposition mechanism - CF4 + 2H2O -> CO2 + 4HF - SF6 + 3H2O -> SO2 + 6HF +1/2O2 2. Advantages - Doesn't have bin deactivated to 850 oC - Resistant to highly Conc. acidic gases such as BCl3, Cl2, F2, HF, SO2, etc. - CO is not emitted. 3. Information - Performance data (6.1 MB)

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