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FPD Equipment Products (LCD – Spin Coating)
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Type
Spin system
Substrate size
piece ~ up to 8" circle
Rotation speed
300 ~ 8,000rpm(@without load) an error of less than 1%
AC Servo Motor(100W/400W)
Spin state
50steps, 20recipes (digital type)
Bowl size
12", Stainless steel
Acceleration /
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Type
Spin system
Substrate size
piece ~ up to 12" circle
Rotation speed
AC Servo Motor (400W)
Spin state
50steps, 20recipes (digital type)
Bowl size
12", Stainless steel
Acceleration / Deceleration rate
Variable
Chuck material
Anodized AL, Acetal
Electric power
220V,
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Type
Spin system
Substrate size
piece ~ up to 4" circle
Rotation speed
300 ~ 7,000rpm(@without load) an error of less than 1%
DC Servo Motor
Spin state
50steps, 20recipes (digital type)
Bowl size
9", Acetal
Acceleration / Deceleration rate
Variable
Chuck material
Anodized AL, Acetal
Electric
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Type
Spin system
Substrate size
piece ~ up to 4" circle
Rotation speed
DC Servo Motor
Spin state
50steps, 20recipes (digital type)
Bowl size
9", Acetal
Acceleration / Deceleration rate
Variable
Chuck material
Anodized AL, Acetal
Electric power
220V,
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D SERIES COATINGS
Corrosion Proof, Transformable Feature
D Series coating product is a water painting for spin coating, where the content of fluorine resin is far higher than other products, leading to very excellent non-adhesion. As it is mainly applied to Aluminum sheet with chemical surface treatment, the product is excellent in corrosion
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D SERIES COATINGS
Corrosion Proof, Transformable Feature
D Series coating product is a water painting for spin coating, where the content of fluorine resin is far higher than other products, leading to very excellent non-adhesion. As it is mainly applied to Aluminum sheet with chemical surface treatment, the product is excellent in corrosion