** Application - Sputter Deposition - Plasma Etch - CVD - Other application that require pressure controller ** Features - Compact - Low vibration operation - Easy and fast maintenance - Pneumatic actuator - Actuator Up/Down install possibility ** Options - Custom sizes available - Various o-ring compounds (Kalrez®,Chemraz®,

** Application - Sputter Deposition - Plasma Etch - CVD - Other application that require pressure controller ** Features - Pneumatic actuator - Bypass pumping line - Particle and vibration free - Easy maintenance ** Options - Various o-ring compounds (Kalrez®,Chemraz®,

** Application - Etcher - CVD(Mo, LP, HDP, PE) - Sputter - R.T.P - LCD, PDP Systems - Other Vacuum System ** Features - Manual Operation - Particle – Free - Vibration – Free - Shaft & Welded bellows Seal (AM350) - Easy to service - Operation Lock Button ** Options - Various o-ring compounds (Kalrez®,Chemraz®, etc.) -

** Application - Etch, CVD (MO, PE, HDP, LP)Implant, Sputtering - Nanotechnology process with high particulate levels - Thin film photovoltaic panels ** Features - Protects process environment from back-streaming powder in the event of dry pump failure - Reduces expensive down time in powder producing process Fast pneumatic

** Application - Etcher - CVD(Mo, LP, HDP, PE) - Sputter - R.T.P - LCD, PDP Systems - Other Vacuum System ** Features - 2Step(soft & fast) pumping - Particle – Free - Vibration – Free - Pneumatic Actuator - Fast valve welded bellows (AM350) - Easy to service ** Options - Various o-ring compounds (Kalrez®,Chemraz®, etc.) -