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FEATURES
* Gas supply system and tools used for semiconductor processing (Gas Cabinet, BSGS, etc.)
* compact, easy to use
* Extremely low internal volume
* 4 to 20mA output models available
* Cleaning and package in CAS Semiconductor's class 10 clean room
* "CE" & "S" marks
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Code:
GAS100
Name:
Gas Rack controller System
GAS Rack Controller Systems Specifications • Foot print optimization • Optimized cost of ownership(low spare part cost)Wide Pressure Range Available • Easy operation & maintenance • No human error risk due to 2 same panels • Automatic purge cycle mode or manual purge for
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Hanbon Gas Cabinets are essential for supplying special gas (a main material) to processing equipment in the manufacture of semiconductors. Since special gas is a poisonous, explosive and naturally ignitable material, it is critically important to supply this gas from cylinder to semiconductor with specific pressure settings.
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