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Valves
1.JoystickValve
Spec]
ValvesQ (max.) : 45 l/min
P (max.) : 315 kgf/?
*Option
-Floating
-Regeneration
-LCB KIT Type
2.control for steering
Spec]
Q (max.) : 15 l/min
P (max.) : 140 kgf/?
-Floating
-Regeneration
3.Single/DoubleActingValve.
Q (max.) : 60 l/min
P (max.) : 210 kgf/?
-Floating
-Regeneration
4.Valve
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Valves
1.JoystickValve
Spec]
ValvesQ (max.) : 45 l/min
P (max.) : 315 kgf/?
*Option
-Floating
-Regeneration
-LCB KIT Type
2.control for steering
Spec]
Q (max.) : 15 l/min
P (max.) : 140 kgf/?
-Floating
-Regeneration
3.Single/DoubleActingValve.
Q (max.) : 60 l/min
P (max.) : 210 kgf/?
-Floating
-Regeneration
4.Valve
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Stainless steel does not readily corrode, rust or stain with water as ordinary steel does. However, it is not fully stain-proof in low-oxygen, high-salinity, or poor air-circulation environments. There are different grades and surface finishes of stainless steel to suit the environment the alloy must endure. Stainless steel is used where both the
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** Application
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
** Features
- Compact
- Low vibration operation
- Easy and fast maintenance
- Pneumatic actuator
- Actuator Up/Down install possibility
** Options
- Custom sizes available
- Various o-ring compounds (Kalrez®,Chemraz®,
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** Application
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
** Features
- Pneumatic actuator
- Bypass pumping line
- Particle and vibration free
- Easy maintenance
** Options
- Various o-ring compounds (Kalrez®,Chemraz®,
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** Application
- Etcher
- CVD(Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System
** Features
- 2Step(soft & fast) pumping
- Particle – Free
- Vibration – Free
- Pneumatic Actuator
- Fast valve welded bellows (AM350)
- Easy to service
** Options
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
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** Application
- Etcher
- CVD(Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System
** Features
- Extremely long life time
- Heating System
- Particle – Free
- Vibration _ Free
- Pneumatic Actuator
- Welded Bellows Seal
- Easy to service
** Options
- Various o-ring compounds (Kalrez®,Chemraz®,
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** Application
- High vacuum process
- All CVD process (including MO, PE,HDP, LP and AP)
- Photovoltaic and semiconductor application
** Features
- Pneumatic actuation
- Rated for 1 million cycles
- Double o-ring seal
- Easy maintenance
** Options
- Various o-ring compounds (Kalrez®,Chemraz®,
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** Application
- Etcher
- CVD(Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System
** Features
- Manual Operation
- Particle – Free
- Vibration – Free
- Shaft & Welded bellows Seal (AM350)
- Easy to service
- Operation Lock Button
** Options
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
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We have different types of Rectangular Gate Valves in our Inventory. you can choose any of your choice from the below list.
Standard Rectangular Gate Valve
Rectangular Gate Valve with housing Cover
Double housing Rectangular Gate valve
Heated type rectangular gate valve
Dual seal type rectangular gate valve
door standard rectangular gate
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** Application
- Etch, CVD (MO, PE, HDP, LP)Implant, Sputtering
- Nanotechnology process with high particulate levels
- Thin film photovoltaic panels
** Features
- Protects process environment from back-streaming powder in the event of dry pump failure
- Reduces expensive down time in powder producing process
Fast pneumatic
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** Application
- Etcher
- CVD(Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System
** Features
- 2Step(soft & fast) pumping
- Particle – Free
- Vibration – Free
- Pneumatic Actuator
- Fast valve welded bellows (AM350)
- Easy to service
** Options
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
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** Application
- Etcher
- CVD(Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System
** Features
- Particle – Free
- Vibration – Free
- Pneumatic Actuator
- Position Indicator
- Fast valve welded bellows (AM350)
- Easy to service
** Options
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
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