RPS Manufacturers,RPS Suppliers

Description

RPS

Plasma is an ionized gas essential in many process of semiconductor such as photo-resist removal, wafer pre-clean and thin film nitridation and oxidation. Ak Tech provides repairing service of RF powered remote sources for generation of oxygen, nitrogen, hydrogen plasma

SERIES	AX7650	AX7650	AX7650	AX7650
Max Flow Rate	2L(0.1~2sim NF3)	2L(0.1~2sim NF3)	2L(0.1~2sim NF3)	2L(0.1~2sim NF3)
Max Power(kw)	5KW	5KW	5KW	5KW
Inition Gas/Pressure	Ar,1~4 Torr	Ar,1~4 Torr	Ar,1~4 Torr	Ar,1~4 Torr
Operatmg Pressure	95~100%	95~100%	95~100%	95~100%
Dissoction Rate	208+/-10%	208+/-10%	208+/-10%	208+/-10%
Power Consumption	VAC,3Ø50/60HZ 30AMP	VAC,3Ø50/60HZ 30AMP	VAC,3Ø50/60HZ 30AMP	VAC,3Ø50/60HZ 30AMP
Weight	17.3Kg	21.4Kg	33.7Kg	20.4Kg/25.8Kg
Dimension(WxHxD) /inch	739.0416.76	739.0416.76	739.0416.76	739.0416.76

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