Semi Conductor (Scrubber)

Semi Conductor (Scrubber)

Semi Conductor (Scrubber) Made in Korea

Description

Product Description Off gas treatment equipment using adsorbent for the toxic gas elimination in the semiconductor manufacturing process.   Product Feature- Low absorbent replacement cost- Own development & production of absorbent can save the manufacturing cost and build competitive supply system for customers satisfaction - Miximization of gas treatment efficiency – Reduce operation cost through safe and high adsorption performance.  - Install by-pass canister- Can treat toxic gas in the case of by-pass condition.  - Sensors for inside temperature of canister- measure and prevent the over heating of canister - Effective pressure management- Inlet Pressure Warning, Alarm Interlock equipments - Install TFT Touch Monitor / PLC- automatic system / easy operation  - Compact Design- less space required - Simple system- easy maintenance  Product Specification / Models ApplicationSemiconductor : Dry Etch, Diffusion, Ion Implantion, Cleaning Gas, BPSG, Oxide, Ect

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