[EUCCK] Carl Zeiss Electron and Ion Beam M...

AURIGA®Information Beyond Resolution CrossBeam® workstations . the ultimate combination of FIB and GEMINI® column The AURIGA® is a highly flexible CrossBeam® workstation for custom tailored applications. Unique Imaging Imaging of non-conductive specimens using all standard detectors with local charge compensation Simultaneous detection of topographical and compositional information with a unique detector scheme including EsB®-technology Investigation of magnetic samples with GEMINI® objective lens design Advanced Analytics Analysis of non-conducting materials with local charge compensation Optimum chamber geometry for the simultaneous integration of EDS, EBSD, STEM, WDS, SIMS etc. Precise Processing Innovative FIB technology with best-in-class resolution (< 2.5 nm) High resolution live FE-SEM monitoring of the entire preparation process Advanced gas processing technology for ion and e-beam assisted etching and deposition Custom-Tailored and Future Assured Based on a fully modular concept, the AURIGA® CrossBeam® workstation can be tailored to the individual customer's applications . today and in the future Starting with a high-performance FE-SEM platform, the system can be upgraded with a wide variety of hardware and software options, such as FIB, GIS, local charge compensation system and different detectors. AURIGA® and AURIGA® 60 Essential Specifications MODEL SEM FIB Resolution GEMINI® column 1.0 nm at 15 kV1.9 nm at 1 kVValues measured at optimum working distance Cobra column: < 2.5 nm at 30 kVCanion column: < 7 nm at 30 kV Magnification 12x - 1000kx 300x-500kx Probe Current 4 pA - 20 nA (100 nA optional ) 1pA-50nA Acceleration Voltage 0.1-30kV <1.0-30kV Emitter Thermal field emission type Ga Liquid metal ion source(LMIS) Gas Injection System a) Multi GIS for up to 5 precursors (Pt, C, W, insulator, fluorine, further gases on request)b) Multi GIS for up to 4 precursors with integrated local charge compensation system(use of all standard detectors possible)c) Single GIS system for 1 precursor (Pt, further gases on request)d) Fully automated and pneumatic retractable gas injector for local charge compensation and in-situ sample cleaning (use of all standard high vacuum detectors possible) Detectors In-lens: High efficiency annular type SE detectorChamber: Everhart-Thornley type SE detectorIn-lens: EsB® detector with filtering grid for BSE detection, filtering voltage 0 - 1500 VChamber: Combined Secondary Electron Secondary Ion (SESI) detector based on scintillator photomultiplier systemSolid state or scintillator type BSD detector GEMINI® multimode BF/DF STEM detector Chamber Multiple accessory ports for various options including STEM, 4QBSD, EBSD, EDS, WDS, SIMS, CL, GIS systems, cryo, local charge compensation and sample manipulation systems 2 x IR CCD-cameras included for sample viewing More information>> e-Book