Cryo Pump

 - On-Board Cryogenics High Vacuum pumps with on-board Microprocessor control are quite extraordinary product designed to have self-diagnosis function and online communication.They are designed to implement High-Vacuum pumping control as well as Auto/Manual Regeneration by attaching Heater, T/C Gauge, Roughing Valve, N2 Purge Valve and primary/secondary sensors to the Cryo-Torr Standard Cryopump, thereby monitor and control them with Microprocessor.Today, On-Board cryopump became global standard of High Vacuum Pump in the aspect of reliability and performance.On-Board cryopump is quite appropriate to the processes requiring high vacuum, since it is clean, highly reliable and has high pumping speed.1st and 2nd gauge reading values are indicated on the one display by turn when it is chosen. - Quite fast regeneration - State-of-the-art On-Board control system - Oil-free high vacuum pump - Maintaining low residual partial pressure gas - Minimizing pumping downtime with high pumping speed - Optimal to such areas as Ion Implantation, PVD and Sputtering, those require high vacuum