Rapid Thermal Process(RTP) System Manufacturers,Rapid Thermal Process(RTP) System Suppliers

Description

Features Our RTP system is available with max 6inch wafer capability. This has been specially developed to meet the requirements of University, Research Laboratory. The Quality control and small scale production are possible Expressly, RTP is enable to easy and accurate temperature control and Data base(e.g. effect on Heating; Sample Temperature, Pressure…) Application RTA, RTO Diffusion, Metrication, Solicitation Crystallization, Diversification Implant Quality Control Specification Sample Size : 6inch Gas Flow Rate is Displayed on the LCD Monitor using Analog Signal Heat Source : Halogen Lamp Max. Temperature : 1000°C Process Temperature Range : 200°C ~ 900°C Heating Uniformity : <± 5% in 6" Area Ultimate Pressure : <5 x 10-2 Torr Atmospheric & Vacuum Process are Possible. All System Control using Pentium 4 Industrial Computer & 17" LCD Monitor Temp. PID Control is Possible using Labview Software automatically

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