AURORA - Magnetron Sputtering System

AURORA - Magnetron Sputtering System

AURORA - Magnetron Sputtering System Made in Korea

Description

AURORA provides customer with a high quality & reliable thin film deposition. Magnetron sputtering sources are specially designed for maximum erosion rate.AURORA offers a low risk manufacturing solution. Application Dielectric layers(High K) and conductive electrodes for transistor gate and memory cell, passivation and diffusion barrier, seed layers(metal liners) and conductive layers for IC interconnection Technology DC, reactive, RF-sputtering system Cathodes are DC / RF compatible Optimized magnetron source design for a high target utilization Substrate pretreatment by means of heating Simple & compact system design for small footprint User friendly control system Specification 1 process chamber system 1 load lock chambers with standard wafer magazines Linear sample transfer Substrate dimensions up to 8" Substrate heating max. 900 °C Turbo molecular pump of high-vacuum pumping Booster & oil rotary combination pump of low-vacuum pumping system Auto pressure control with throttle valve Circular or rectangular type of sputter source Sputter power DC 300~3000W, RF generator 600W~3000Wwith 13.56MHz auto matching box Gas delivery module with mass flow controller Manual / PC, PLC control including Windows user interfacefor fully automatic process control

Product Inquiry

Your Name:
Your E-Mail:
Telephone Number:
Fax Number:
Your Country & Territory:
Address:
Subject:
Product Quantity Looking for:
Your Message:

Note: Please clealry menction the product/product names, Model, Size & other specifications that will help us to reply you as soon as possible.
Additional Details Required:
  • Minimum Order Quantity
  • Payment Terms
  • More Product Details
  • Availability / Cost
  • Shipping Details
  • Certificates
  • Expected Delivery Lead Time
Confirm Text:    captcha
 

Purchase Product Catalog

Payment & Shipping Conditions:
  • Payment: We accept payment through Paypal Only.
  • Shipping: We will ship the catalog once the payment is received. And you will be receiving the catalog with in 10 -14 busines days. Shipping might be delayed in due to international shipping conditions which is depends on the countries receiveing. In case hard copy of catalog is not available then we will ship the soft copy.
  • Refund: We can refund the order before shipping process was initiated. Incase Catalog not available, we will make sure to refund the order.
  • Note: This is a Catalog Produt.

Products Categories

Products Keywords

Share AURORA - Magnetron Sputtering System in Social Media

© 2022 Bestmadeinkorea. All Rights Reserved.