OZONE has been used to deposit high quality of poly & amorphous silicon film at low substrate temperature. It offers a low risk manufacturing solution, high profit via high productivity to customer.
Application
Mainly, Poly silicon films for flat panel display, amorphous silicon solar cells, diamond like carbon coating, carbon nano tube growth, AM-OLED
Technology
Unique gas shower head design for film uniformity
Designed for large area deposition
High process productivity
Filament design for long life & easy maintenance
Specification
1 process chamber
1 load lock chamber with standard wafer magazines
Linear sample transfer
Substrate dimensions up to 370mm x 400mm
Substrate heating max. 1,000°C
Turbo molecular pump of high-vacuum pumping
Auto pressure control with throttle valve
Gas delivery module with mass flow controller
Manual / PC, PLC control including Windows user interface for fully automatic process control
OZONE - Hot Wire(Catalytic) Chemical Vapor...
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Description
Product Inquiry
Purchase Product Catalog
Payment & Shipping Conditions:
- Payment: We accept payment through Paypal Only.
- Shipping: We will ship the catalog once the payment is received. And you will be receiving the catalog with in 10 -14 busines days. Shipping might be delayed in due to international shipping conditions which is depends on the countries receiveing. In case hard copy of catalog is not available then we will ship the soft copy.
- Refund: We can refund the order before shipping process was initiated. Incase Catalog not available, we will make sure to refund the order.
- Note: This is a Catalog Produt.
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