In-line Sputter System for Large Area Deposition Manufacturers,In-line Sputter System for Large Area Deposition Suppliers

Description

Optical coatings

Hard coatings

Metal coatings

Polymer surface modifications

Coatings for flat panel display electorates

Special Features

In-line sputter system with 8ea linear sputter guns for R&D and a small-scale production.

Automatic process control through PLC interfacing.

Carrier loading capability : 2x24" sheets/carrier.

Standard tact time: depends on processing.

Automatic jig moving system.

Ion cleaning system with linear ion gun.

Sheet capacity : 300 × 24" per day.

Average throughput Up to 90,000 sheets per year

Specifications

Dimension : 10,464L x 2,244.5H x 1,363W(mm3)

Power : Sputter Gun: DC Pulse 10kW

Ion Gun: 3kW

Gas : Ar, O2, N2

Pump : Loading, Rotary(1,000L/min), TMP(800L/sec)

Process, Rotary(1,000L/min), TMP(1,400L/sec)

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