Ion Beam Sputter for Precision Optics

Ion Beam Sputter for Precision Optics

Ion Beam Sputter for Precision Optics Made in Korea

Description

X-ray mirror

Neutron mirror

Reflective optics for EUV lithography

Special Features

Ion beam sputtering system for precision optics.

Layer deposition and deposited layer milling, sequentially processed, with two ion guns.

Substrate rotation for uniform deposition.

Automatic distance control between ion guns and substrate.

Target rotated and linearly swept, for its uniform erosion.

Multilayer deposition with a low surface roughness(normally controlled below ~4Å)

Specifications

Wafer capacity : 1 x 4"

Dimension : 1,500L × 2,400H × 900W (mm3)

Power : 2 sets of ion guns(DC 1,200V, 200mA)

Gas : Ar / N2

Pump: rotary(970l/min) & turbo(2,250l/s)

Heater : SiC heater 6"(Max. 650°C)

Power : DC 1.2kW

Loadlock system : single wafer loading

Control : LabView-based PC control


Product Inquiry

Your Name:
Your E-Mail:
Telephone Number:
Fax Number:
Your Country & Territory:
Address:
Subject:
Product Quantity Looking for:
Your Message:

Note: Please clealry menction the product/product names, Model, Size & other specifications that will help us to reply you as soon as possible.
Additional Details Required:
  • Minimum Order Quantity
  • Payment Terms
  • More Product Details
  • Availability / Cost
  • Shipping Details
  • Certificates
  • Expected Delivery Lead Time
Confirm Text:    captcha
 

Purchase Product Catalog

Payment & Shipping Conditions:
  • Payment: We accept payment through Paypal Only.
  • Shipping: We will ship the catalog once the payment is received. And you will be receiving the catalog with in 10 -14 busines days. Shipping might be delayed in due to international shipping conditions which is depends on the countries receiveing. In case hard copy of catalog is not available then we will ship the soft copy.
  • Refund: We can refund the order before shipping process was initiated. Incase Catalog not available, we will make sure to refund the order.
  • Note: This is a Catalog Produt.

Products Categories

Products Keywords

Share Ion Beam Sputter for Precision Optics in Social Media