PECVD System for Low Temp. CNTs Synthesis Manufacturers,PECVD System for Low Temp. CNTs Synthesis Suppliers

Description

CNTs growth

Special Features

Small RF-PECVD system for CNT(Carbon Nano Tube) synthesis.

Low temperature synthesis of CNTs(under about 400°C).

Specifications

Heating range : 400 ~ 600°C

Average throughput : Up to 5,000 wafers per year

Wafer capacity : 1 × 4"

Dimension : 1,100L × 1,500H × 900W (mm3)

Power : AC 100W (13.56MHz)

Gas : NH3/C2H2/Ar/O2/N2

Heater : silicon carbide(heating rate: 40°C/min, max. temp.:850°C, deviation: negligible)

Pump : rotary(600 l/min)

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